ʻOiai ua puni nā lasers ultrafast no nā makahiki he ʻumi, ua ulu wikiwiki nā noi ʻoihana i nā makahiki he iwakālua i hala. I ka makahiki 2019, ʻo ke kumukūʻai mākeke o ka ultrafastmea laserʻO ka hana ʻana ma kahi o US $ 460 miliona, me ka nui o ka ulu makahiki o 13%. ʻO nā wahi noi kahi i hoʻohana pono ʻia ai nā lasers ultrafast e hana i nā mea ʻoihana e komo pū me ka hana ʻana o ka photomask a me ka hoʻoponopono ʻana i ka ʻoihana semiconductor a me ka silicon dicing, ka ʻoki ʻana/scribing aniani a me ka wehe ʻana o ka kiʻiʻoniʻoni ITO (indium tin oxide) i nā mea uila mea kūʻai aku e like me nā kelepona paʻalima a me nā papa, piston texturing no ka ʻoihana kaʻa, ka hana ʻana o ka stent coronary a me ka hana ʻana o nā mea microfluidic no ka ʻoihana lapaʻau.

01 Hana ʻana a me ka hoʻoponopono ʻana i nā photomask ma ka ʻoihana semiconductor
Ua hoʻohana ʻia nā lasers Ultrafast ma kekahi o nā noi ʻoihana mua loa i ka hana ʻana i nā mea. Ua hōʻike ʻo IBM i ka hoʻohana ʻana o ka ablation laser femtosecond i ka hana photomask i nā makahiki 1990. Ke hoʻohālikelike ʻia me ka ablation laser nanosecond, hiki ke hana i ka spatter metala a me ka hōʻino aniani, ʻaʻole hōʻike nā masks laser femtosecond i ka spatter metala, ʻaʻohe hōʻino aniani, a pēlā aku. Nā pono. Hoʻohana ʻia kēia ʻano hana e hana i nā kaapuni i hoʻohui ʻia (ICs). ʻO ka hana ʻana i kahi chip IC e koi paha i 30 mau masks a me ke kumukūʻai >$100,000. Hiki i ka hana ʻana o ka laser Femtosecond ke hana i nā laina a me nā kiko ma lalo o 150nm.

Kiʻi 1. Hana ʻana a me ka hoʻoponopono ʻana i ka pale maka kiʻi

Kiʻi 2. Nā hopena hoʻonui o nā ʻano pale maka like ʻole no ka lithography ultraviolet koʻikoʻi
02 Ka ʻoki ʻana i ka Silicon ma ka ʻoihana semiconductor
ʻO ka ʻoki ʻana i ka wafer Silicon kahi hana hana maʻamau i ka ʻoihana semiconductor a hana pinepine ʻia me ka hoʻohana ʻana i ka dicing mechanical. Hoʻomohala pinepine kēia mau huila ʻoki i nā microcracks a he paʻakikī ke ʻoki i nā wafers lahilahi (e laʻa me ka mānoanoa < 150 μm). Ua hoʻohana ʻia ka ʻoki ʻana i nā wafers silicon ma ka ʻoihana semiconductor no nā makahiki he nui, ʻoi aku hoʻi no nā wafers lahilahi (100-200μm), a ua hana ʻia i nā ʻanuʻu he nui: ka grooving laser, ukali ʻia e ka hoʻokaʻawale mechanical a i ʻole ka ʻoki stealth (ʻo ia hoʻi ke kukuna laser infrared i loko o ka silicon scribing) ukali ʻia e ka hoʻokaʻawale lipine mechanical. Hiki i ka laser pulse nanosecond ke hana i 15 mau wafers i kēlā me kēia hola, a hiki i ka laser picosecond ke hana i 23 mau wafers i kēlā me kēia hola, me ke ʻano kiʻekiʻe.
03 ʻOki/kālai aniani ma ka ʻoihana uila hoʻopau
Ke lahilahi nei nā pale paʻi a me nā aniani pale no nā kelepona paʻalima a me nā kamepiula lawe lima a ua piʻo kekahi mau ʻano geometric. ʻOi aku ka paʻakikī o ka ʻoki ʻana i ka mīkini kuʻuna. ʻO ka maʻamau, hana nā lasers maʻamau i ka maikaʻi ʻoki maikaʻi ʻole, ʻoiai ke hoʻopaʻa ʻia kēia mau hōʻike aniani i 3-4 mau papa a ua hoʻomaʻamaʻa ʻia ke aniani pale 700 μm mānoanoa, hiki ke haki me ke kaumaha kūloko. Ua hōʻike ʻia nā lasers Ultrafast e hiki ke ʻoki i kēia mau aniani me ka ikaika ʻoi aku ka maikaʻi. No ka ʻoki ʻana i ka panela pālahalaha nui, hiki ke hoʻopili ʻia ka laser femtosecond ma luna o ka ʻili hope o ka pepa aniani, e kahakaha ana i loko o ke aniani me ka ʻole o ka hōʻino ʻana i ka ʻili mua. A laila hiki ke haki ke aniani me ka hoʻohana ʻana i nā ʻano mechanical a thermal paha ma ke ʻano i helu ʻia.

Kiʻi 3. ʻOki ʻana i ke ʻano kūikawā o ke aniani laser wikiwiki loa Picosecond
04 Nā ʻano Piston i loko o ka ʻoihana kaʻa
Hana ʻia nā ʻenekini kaʻa māmā me nā mea hoʻohuihui alumini, ʻaʻole i kūpaʻa i ke komo ʻana e like me ka hao i hoʻolei ʻia. Ua ʻike ʻia nā noiʻi e hiki i ka hana laser femtosecond o nā ʻano piston kaʻa ke hōʻemi i ka friction a hiki i ka 25% no ka mea hiki ke mālama pono ʻia nā ʻōpala a me ka ʻaila.

Kiʻi 4. Ka hana laser femtosecond o nā pistons mīkini kaʻa e hoʻomaikaʻi i ka hana mīkini
05 Ka hana ʻana o ka stent coronary ma ka ʻoihana lapaʻau
Hoʻokomo ʻia nā miliona o nā stent coronary i loko o nā aʻa coronary o ke kino e wehe i kahi ala no ke kahe ʻana o ke koko i loko o nā kīʻaha koko i paʻa, e hoʻopakele ana i nā miliona o nā ola i kēlā me kēia makahiki. Hana ʻia nā stent coronary mai ka metala (e laʻa, kila kila, nickel-titanium shape memory alloy, a i ʻole ka cobalt-chromium alloy hou loa) me ka laulā strut ma kahi o 100 μm. Ke hoʻohālikelike ʻia me ka ʻoki laser pulse lōʻihi, ʻo nā pono o ka hoʻohana ʻana i nā lasers ultrafast e ʻoki i nā brackets he kiʻekiʻe ke ʻano o ka ʻoki ʻana, ʻoi aku ka maikaʻi o ka hoʻopau ʻana o ka ʻili, a me ka liʻiliʻi o nā ʻōpala, kahi e hōʻemi ai i nā kumukūʻai ma hope o ka hana ʻana.

06 Ka hana ʻana i nā mea hana Microfluidic no ka ʻoihana lapaʻau
Hoʻohana pinepine ʻia nā mea hana Microfluidic i ka ʻoihana lapaʻau no ka hoʻāʻo ʻana i nā maʻi a me ka ʻike ʻana i nā ʻōpala. Hana ʻia kēia mau mea ma o ka hoʻoheheʻe ʻana i nā ʻāpana pākahi a laila hoʻopili ʻia me ka hoʻopili ʻana a i ʻole ka hoʻopili ʻana. Loaʻa i ka hana laser Ultrafast o nā mea hana microfluidic ka pono o ka hana ʻana i nā microchannels 3D i loko o nā mea aniani e like me ke aniani me ka ʻole o ka pono no nā pilina. ʻO kekahi ʻano hana ka hana laser ultrafast i loko o ke aniani nui a ukali ʻia e ka etching kemika pulu, a ʻo kekahi ka ablation laser femtosecond i loko o ke aniani a i ʻole ka plastic i loko o ka wai distilled e wehe i nā ʻōpala. ʻO kekahi ala e hana ai i nā kahawai i loko o ka ʻili aniani a sila iā lākou me kahi uhi aniani ma o ka hoʻopili laser femtosecond.

Kiʻi 6. ʻO ke kālai ʻana i koho ʻia e ka laser femtosecond e hoʻomākaukau i nā kahawai microfluidic i loko o nā mea aniani
07 ʻEli liʻiliʻi o ka nozzle injector
Ua pani ka hana ʻana o ka mīkini ʻana i ka microhole laser Femtosecond i ka micro-EDM ma nā ʻoihana he nui ma ka mākeke injector kiʻekiʻe-kaomi ma muli o ka maʻalahi nui i ka hoʻololi ʻana i nā ʻaoʻao puka kahe a me nā manawa hana pōkole. ʻO ka hiki ke hoʻomalu ponoʻī i ke kūlana kiko a me ke kūlou ʻana o ke kukuna ma o ke poʻo scan precessing ua alakaʻi i ka hoʻolālā ʻana i nā ʻaoʻao puka (e laʻa, barela, flare, convergence, divergence) hiki ke hoʻolaha i ka atomization a i ʻole ke komo ʻana i loko o ke keʻena kuni. Aia ka manawa ʻeli ʻana i ka nui o ka ablation, me ka mānoanoa o ka ʻeli ʻana o 0.2 - 0.5 mm a me ke anawaena o ka lua o 0.12 - 0.25 mm, e hana ana i kēia ʻenehana he ʻumi manawa wikiwiki ma mua o ka micro-EDM. Hana ʻia ka Microdrilling i ʻekolu mau pae, me ka roughing a me ka hoʻopau ʻana i nā lua ma o ka pilot. Hoʻohana ʻia ʻo Argon ma ke ʻano he kinoea kōkua e pale i ka borehole mai ka oxidation a e pale i ka plasma hope loa i nā pae mua.

Kiʻi 7. Ka hana ʻana i ka laser Femtosecond kiʻekiʻe o ka lua taper i hoʻohuli ʻia no ka injector mīkini diesel
08 ʻAno laser wikiwiki loa
I nā makahiki i hala iho nei, i mea e hoʻomaikaʻi ai i ka pololei o ka mīkini ʻana, e hōʻemi i ka pōʻino o nā mea, a hoʻonui i ka pono o ka hana ʻana, ua lilo mālie ke kahua o ka micromachining i mea nui o nā mea noiʻi. Loaʻa i ka laser Ultrafast nā pono hana like ʻole e like me ka haʻahaʻa o ka pōʻino a me ke kiʻekiʻe o ka pololei, kahi i lilo ai i mea nui o ka hoʻolaha ʻana i ka hoʻomohala ʻana o ka ʻenehana hana. I ka manawa like, hiki i nā lasers ultrafast ke hana ma nā ʻano mea like ʻole, a ʻo ka pōʻino o ka hana ʻana o ka laser he kuhikuhi noiʻi nui nō hoʻi. Hoʻohana ʻia ka laser Ultrafast e ablate i nā mea. Ke kiʻekiʻe aʻe ka nui o ka ikehu o ka laser ma mua o ka paepae ablation o ka mea, e hōʻike ka ʻili o ka mea ablated i kahi ʻano micro-nano me kekahi mau ʻano. Hōʻike ka noiʻi ʻana he mea maʻamau kēia ʻano ʻili kūikawā e hana ʻia i ka wā e hana ai ka laser i nā mea. Hiki i ka hoʻomākaukau ʻana i nā ʻano micro-nano ʻili ke hoʻomaikaʻi i nā waiwai o ka mea ponoʻī a hiki nō hoʻi ke hoʻomohala i nā mea hou. ʻO kēia ka mea e hoʻolilo ai i ka hoʻomākaukau ʻana i nā ʻano micro-nano ʻili e ka laser ultrafast i ʻano loea me ke koʻikoʻi o ka hoʻomohala ʻana. I kēia manawa, no nā mea metala, hiki i ka noiʻi ʻana ma ka ultrafast laser surface texturing ke hoʻomaikaʻi i nā waiwai pulu o ka ʻili metala, hoʻomaikaʻi i ka friction ʻili a me nā waiwai komo, hoʻonui i ka hoʻopili ʻana o ka uhi, a me ka hoʻonui ʻana a me ka hoʻopili ʻana o nā cell.

Kiʻi 8. Nā waiwai superhydrophobic o ka ʻili silicon i hoʻomākaukau ʻia e ka laser
Ma ke ʻano he ʻenehana hana ʻoi loa, loaʻa i ka hana laser ultrafast nā ʻano o ka wahi liʻiliʻi i hoʻopilikia ʻia e ka wela, ke kaʻina hana non-linear o ka launa pū ʻana me nā mea, a me ka hana hoʻonā kiʻekiʻe ma mua o ka palena diffraction. Hiki iā ia ke hoʻokō i ka hana micro-nano kiʻekiʻe a me ka pololei kiʻekiʻe o nā mea like ʻole. a me ka hana ʻana o ka micro-nano ʻekolu-dimensional. ʻO ka hoʻokō ʻana i ka hana laser o nā mea kūikawā, nā ʻano paʻakikī a me nā mea hana kūikawā e wehe i nā ala hou no ka hana micro-nano. I kēia manawa, ua hoʻohana nui ʻia ka laser femtosecond ma nā kahua ʻepekema ʻoi loa: hiki ke hoʻohana ʻia ka laser femtosecond e hoʻomākaukau i nā mea optical like ʻole, e like me nā microlens arrays, nā maka hui bionic, nā waveguides optical a me nā metasurfaces; me ka hoʻohana ʻana i kona pololei kiʻekiʻe, hoʻonā kiʻekiʻe a me Me nā hiki ke hana ʻekolu-dimensional, hiki i ka laser femtosecond ke hoʻomākaukau a hoʻohui paha i nā chips microfluidic a me optofluidic e like me nā ʻāpana microheater a me nā kahawai microfluidic ʻekolu-dimensional; Eia kekahi, hiki i ka laser femtosecond ke hoʻomākaukau i nā ʻano micro-nanostructures ʻili like ʻole e hoʻokō i ka anti-reflection, anti-reflection, super-hydrophobic, anti-icing a me nā hana ʻē aʻe; ʻaʻole wale kēlā, ua hoʻopili ʻia ka laser femtosecond ma ke kahua o ka biomedicine, e hōʻike ana i ka hana koʻikoʻi ma nā kahua e like me nā micro-stent biological, nā substrates moʻomeheu cell a me ke kiʻi microscopic biological. Nā manaʻolana noi ākea. I kēia manawa, ke hoʻonui nei nā kahua noi o ka hana laser femtosecond i kēlā me kēia makahiki. Ma waho aʻe o nā micro-optics i ʻōlelo ʻia ma luna, microfluidics, multi-functional micro-nanostructures a me nā noi ʻenekinia biomedical, he kuleana nui nō hoʻi ia ma kekahi mau kahua e kū mai ana, e like me ka hoʻomākaukau metasurface. , hana micro-nano a me ka mālama ʻike optical multi-dimensional, etc.
Ka manawa hoʻouna: ʻApelila-17-2024








