ʻOiai ua puni nā lasers ultrafast no nā makahiki he nui, ua ulu wikiwiki nā noi ʻoihana i nā makahiki ʻelua i hala. I ka makahiki 2019, ka waiwai o ka mākeke o ultrafastmea laserʻO ka hana ʻana ma kahi o US $ 460 miliona, me ka ulu ʻana o ka makahiki he 13%. ʻO nā wahi noi kahi i hoʻohana maikaʻi ʻia ai nā lasers ultrafast no ka hoʻoponopono ʻana i nā mea ʻoihana e pili ana i ka hana photomask a me ka hoʻoponopono ʻana i ka ʻoihana semiconductor a me ka dicing silicon, ka ʻoki aniani / scribing a me (indium tin oxide) wehe kiʻi ʻoniʻoni ITO i nā mea kūʻai aku e like me nā kelepona paʻalima a me nā papa. , nā kikokikona piston no ka ʻoihana kaʻa, ka hana stent coronary a me ka hana ʻana i nā mea hana microfluidic no ka ʻoihana lapaʻau.
01 Photomask hana a hoʻoponopono i ka ʻoihana semiconductor
Ua hoʻohana ʻia nā lasers Ultrafast i kekahi o nā noi ʻoihana mua loa i ka hoʻoili waiwai. Ua hōʻike ʻo IBM i ka noi ʻana o ka ablation laser femtosecond i ka hana photomask i nā makahiki 1990. Ke hoʻohālikelikeʻia me ka nanosecond laser ablation, hiki ke hana i ka metala spatter a me ke aniani pōʻino, femtosecond laser masks hōʻike i ka metala spatter,ʻaʻohe aniani pōʻino, a me nā mea maikaʻi. Hoʻohana ʻia kēia ʻano hana no ka hana ʻana i nā kaapuni i hoʻohui ʻia (ICs). No ka hana ʻana i kahi chip IC e koi ʻia a hiki i 30 masks a me ke kumukūʻai> $100,000. Hiki i ka hana laser Femtosecond ke hana i nā laina a me nā helu ma lalo o 150nm.
Kiʻi 1. Ka hana a me ka hoʻoponopono Photomask
Kiʻi 2. ʻO nā hopena o ka hoʻonui ʻana o nā ʻano mask like ʻole no ka lithography ultraviolet kiʻekiʻe
02 ʻoki ʻana i ka silikoni i ka ʻoihana semiconductor
ʻO ka silicone wafer dicing kahi hana hana maʻamau i ka ʻoihana semiconductor a hana maʻamau me ka hoʻohana ʻana i ka mīkini dicing. Hoʻokumu pinepine kēia mau huila ʻoki i nā microcracks a paʻakikī ke ʻoki ʻoki lahilahi (e laʻa me ka mānoanoa <150 μm) wafers. Ua hoʻohana ʻia ka ʻokiʻoki ʻana i nā wafers silicon i ka ʻoihana semiconductor no nā makahiki he nui, ʻoi aku hoʻi no nā wafers lahilahi (100-200μm), a ua hana ʻia ma nā ʻanuʻu he nui: laser grooving, a ukali ʻia e ka hoʻokaʻawale mechanical a i ʻole ka ʻoki stealth (ie infrared laser beam i loko. ka scribing silicon) a ukali ʻia e ka hoʻokaʻawale ʻana i ka lipine mechanical. Hiki i ka laser pulse nanosecond ke hana i nā wafers 15 i kēlā me kēia hola, a hiki i ka laser picosecond ke hana i nā wafers 23 i kēlā me kēia hola, me ke ʻano kiʻekiʻe.
03 ʻOki aniani / kākau ʻana i ka ʻoihana uila hoʻopau
ʻO nā pale paʻi a me nā makaaniani pale no nā kelepona paʻalima a me nā kamepiula e ʻoi aku ka lahilahi a ua ʻāwili kekahi mau ʻano geometric. ʻOi aku ka paʻakikī o kēia ʻokiʻoki mechanical maʻamau. Hoʻopuka pinepine nā lasers maʻamau i ka maikaʻi ʻoki maikaʻi ʻole, ʻoiai ke hoʻopaʻa ʻia kēia mau aniani hōʻike 3-4 mau papa a ʻo ka 700 μm mānoanoa o ke aniani pale e hoʻoheheʻe ʻia, hiki ke haki me ke koʻikoʻi kūloko. Ua hōʻike ʻia nā lasers ultrafast e hiki ke ʻoki i kēia mau aniani me ka ikaika o ka maka. No ka ʻoki ʻana i ka pā pālahalaha nui, hiki ke kau ʻia ka laser femtosecond ma ka ʻaoʻao hope o ka ʻaoʻao aniani, e ʻoki ana i loko o ke aniani me ka ʻole e hōʻino i ka ʻili o mua. A laila hiki ke wāwahi ʻia ke aniani me ka hoʻohana ʻana i ka mīkini a i ʻole ka wela ma ke ʻano i helu ʻia.
Kiʻi 3. Picosecond ultrafast laser aniani ʻoki ʻano kūikawā
04 Piston textures i ka ʻoihana kaʻa
Hana ʻia nā ʻenekini kaʻa māmā me nā alumini alumini, ʻaʻole like me ka ʻaʻahu e like me ka hao. Ua ʻike nā haʻawina e hiki ke hoʻemi i ka friction a hiki i ka 25% no ka mea hiki ke mālama pono i ka ʻōpala a me ka ʻaila.
Kiʻi 4. ʻO ka hana laser Femtosecond o nā piston mīkini kaʻa e hoʻomaikaʻi i ka hana ʻenekini
05 Ka hana ʻana i ka stent coronary i ka ʻoihana lapaʻau
Hoʻokomo ʻia nā miliona o nā stents coronary i loko o nā aʻa coronary o ke kino e wehe i kahi ala e kahe ai ke koko i loko o nā moku i hoʻopaʻa ʻia, e hoʻopakele ai i nā miliona o nā ola i kēlā me kēia makahiki. Hana ʻia nā stents coronary mai ka metala (e laʻa, ke kila kila, ka nickel-titanium shape memory alloy, a i ʻole ka cobalt-chromium alloy hou aʻe) uea me ka laula strut ma kahi o 100 μm. Ke hoʻohālikelike ʻia me ka ʻokiʻoki laser lōʻihi, ʻo nā mea maikaʻi o ka hoʻohana ʻana i nā laser ultrafast e ʻoki i nā brackets he kiʻekiʻe ʻoki maikaʻi, ʻoi aku ka maikaʻi o ka ʻili, a me ka liʻiliʻi o nā ʻōpala, e hōʻemi ana i nā kumukūʻai hope.
06 ʻO ka hana ʻana i nā mea hana microfluidic no ka ʻoihana lapaʻau
Hoʻohana maʻamau nā mea microfluidic i ka ʻoihana lapaʻau no ka hoʻāʻo ʻana i ka maʻi a me ka maʻi. Hana ʻia kēia mau mea e ka micro-injection molding o kēlā me kēia ʻāpana a laila hoʻopaʻa ʻia me ka hoʻohana ʻana i ka gluing a i ʻole welding. Loaʻa ka maikaʻi o ka hana laser ultrafast o nā mea microfluidic i ka hana ʻana i nā microchannels 3D i loko o nā mea aniani e like me ke aniani me ka ʻole o ka pono o nā pilina. ʻO kekahi ʻano hana ʻo ia ka hana laser ultrafast i loko o ke aniani nui a ukali ʻia e ka etching chemical wet, a ʻo kekahi ʻo ka femtosecond laser ablation i loko o ke aniani a i ʻole ka plastic i loko o ka wai hoʻoheheʻe e wehe i nā ʻōpala. ʻO kekahi ala ʻē aʻe, ʻo ia ka hoʻopili ʻana i nā kahawai mīkini i loko o ka ʻili aniani a hoʻopaʻa iā lākou me kahi uhi aniani ma o ka wili laser femtosecond.
Kiʻi 6. Femtosecond laser-induced selective etching no ka hoʻomākaukau ʻana i nā kahawai microfluidic i loko o nā mea aniani.
07 ʻO ka wili liʻiliʻi o ka nozzle injector
Ua hoʻololi ʻo Femtosecond laser microhole machining i ka micro-EDM ma nā ʻoihana he nui i ka mākeke injector kiʻekiʻe ma muli o ka maʻalahi o ka hoʻololi ʻana i nā profile puka kahe a me nā manawa machining pōkole. ʻO ka hiki ke hoʻomalu ʻokoʻa i ke kūlana kikoo a me ke kāʻei ʻana o ka lāʻau ma o ke poʻo scan mua i alakaʻi i ka hoʻolālā ʻana i nā profiles aperture (eg, barrel, flare, convergence, divergence) hiki ke hoʻoikaika i ka atomization a i ʻole ke komo ʻana i loko o ke keʻena puhi. ʻO ka manawa wili e pili ana i ka nui ablation, me ka mānoanoa drill o 0.2 - 0.5 mm a me ke anawaena puka o 0.12 - 0.25 mm, e hana ana i kēia ʻenehana he ʻumi mau manawa wikiwiki ma mua o ka micro-EDM. Hana ʻia ʻo Microdrilling i ʻekolu mau ʻanuʻu, me ka hoʻopaʻa ʻana a me ka hoʻopau ʻana i nā lua ma waena o ka pilot. Hoʻohana ʻia ʻo Argon ma ke ʻano he kinoea kōkua no ka pale ʻana i ka borehole mai ka oxidation a me ka pale ʻana i ka plasma hope i ka wā mua.
Kiʻi 7. Femtosecond laser kiʻekiʻe-pololei kaʻina hana o ka inverted taper puka no ka diesel engine injector
08 He kikokikona laser wikiwiki loa
I nā makahiki i hala iho nei, i mea e hoʻomaikaʻi ai i ka pololei o ka mīkini, e hōʻemi i ka pōʻino waiwai, a me ka hoʻonui ʻana i ka hana pono, ua lilo ke kahua o ka micromachining i mea nui o nā mea noiʻi. Loaʻa i ka laser Ultrafast nā pono hana like ʻole e like me ka haʻahaʻa haʻahaʻa a me ke kiʻekiʻe kiʻekiʻe, ka mea i lilo i kumu no ka hoʻolaha ʻana i ka hoʻomohala ʻana i ka ʻenehana hana. I ka manawa like, hiki i nā lasers ultrafast ke hana i nā ʻano mea like ʻole, a ʻo ka hōʻino ʻana i nā mea hana laser he alakaʻi noiʻi nui hoʻi. Hoʻohana ʻia ka laser ultrafast e hoʻopau i nā mea. Ke ʻoi aku ka kiʻekiʻe o ka ikehu o ka laser ma mua o ka paepae ablation o ka mea, e hōʻike ka ʻili o ka mea ablated i kahi ʻano micro-nano me kekahi mau hiʻohiʻona. Hōʻike ka noiʻi ʻana he mea maʻamau kēia Structure surface kūikawā i ka wā e hana ai nā mea hana laser. ʻO ka hoʻomākaukau ʻana i nā ʻano micro-nano surface hiki ke hoʻomaikaʻi i nā waiwai o ka mea ponoʻī a hiki i ka hoʻomohala ʻana i nā mea hou. Hana kēia i ka hoʻomākaukau ʻana i nā ʻano micro-nano surface e ka ultrafast laser i ke ʻano ʻenehana me ke koʻikoʻi hoʻomohala koʻikoʻi. I kēia manawa, no nā mea metala, ʻo ka noiʻi ʻana i ka ultrafast laser surface texturing hiki ke hoʻomaikaʻi i nā waiwai pulu ʻili metala, hoʻomaikaʻi i ka friction o ka ʻili a me nā waiwai, hoʻomaikaʻi i ka hoʻopili ʻana i ka uhi, a me ka hoʻonui a me ka hoʻopili ʻana o nā cell.
Kiʻi 8. ʻO nā waiwai superhydrophobic o ka ʻili silika i hoʻomākaukau ʻia e ka laser
Ma ke ʻano he ʻenehana hana ʻokiʻoki, loaʻa i ka ʻenehana laser ultrafast nā hiʻohiʻona o ka wahi liʻiliʻi i hoʻopilikia ʻia i ka wela, ke kaʻina hana ʻole o ka launa pū me nā mea, a me ka hoʻoponopono kiʻekiʻe ma mua o ka palena diffraction. Hiki iā ia ke hoʻomaopopo i ke kiʻekiʻe kiʻekiʻe a me ka kiʻekiʻe kiʻekiʻe o ka hana micro-nano o nā mea like ʻole. a me ʻekolu-dimensional micro-nano structure fabrication. ʻO ka loaʻa ʻana o ka hana laser o nā mea kūikawā, nā hale paʻakikī a me nā mea hana kūikawā e wehe i nā ala hou no ka hana micro-nano. I kēia manawa, ua hoʻohana nui ʻia ka laser femtosecond i nā ʻano ʻepekema ʻokiʻoki: hiki ke hoʻohana ʻia ka laser femtosecond no ka hoʻomākaukau ʻana i nā mea ʻike like ʻole, e like me nā microlens arrays, bionic compound eyes, optical waveguides and metasurfaces; me ka hoʻohana ʻana i kāna kikoʻī kiʻekiʻe, ka hoʻonā kiʻekiʻe a Me nā mana hana ʻekolu-dimensional, hiki i ka laser femtosecond ke hoʻomākaukau a hoʻohui paha i nā ʻāpana microfluidic a me optofluidic e like me nā ʻāpana microheater a me nā kahawai microfluidic ʻekolu; Eia kekahi, hiki i ka laser femtosecond ke hoʻomākaukau i nā ʻano like ʻole o ka micro-nanostructures surface e hoʻokō i ka anti-reflection, anti-reflection, super-hydrophobic, anti-icing a me nā hana ʻē aʻe; ʻAʻole wale ia, ua hoʻohana ʻia ka laser femtosecond ma ke kahua o ka biomedicine, e hōʻike ana i ka hana koʻikoʻi ma nā kula e like me ka biological micro-stents, cell culture substrates a me ka biological microscopic imaging. Nā manaʻo noiʻi ākea. I kēia manawa, ke hoʻonui nei nā papa noi o ka hoʻoili laser femtosecond i kēlā me kēia makahiki. Ma waho aʻe o nā micro-optics i ʻōlelo ʻia ma luna, microfluidics, multi-functional micro-nanostructures a me nā noi ʻenehana biomedical, he hana nui nō hoʻi ia i kekahi mau kahua e kū mai ana, e like me ka hoʻomākaukau ʻana i ka metasurface. , ka hana ʻana o ka micro-nano a me ka mālama ʻana i ka ʻike optical multi-dimensional, etc.
Ka manawa kau: Apr-17-2024
